equipmentDetail

Specification Sheet for Equipment:

AUXILIARY

Inventory Number:

02.000030

Manufacturer:

ALCATEL

Model:

ADS 301

Process:

FAB

Wafer Size:

none

Vintage Date:

1995

Inventory Date:

4/9/2007

Equipment Descripton:

Alcatel ADS 301 Dry Pump


US Operations phone: 1-508-261-7887 fax: 1-508 261-9699 email: usinfo@tsel.com	European Operations phone: +44 (0) 1291 620 660 email: euinfo@tsel.com

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