equipmentDetail

Specification Sheet for Equipment:

LITHOGRAPHY / RESIST

Inventory Number:

78.123

Manufacturer:

KARL SUSS

Model:

MA 150

Process:

FAB

Wafer Size:

150

Vintage Date:

1987

Inventory Date:

8/5/2007

Equipment Descripton:

Karl Suss Front-Side Mask Aligner


US Operations phone: 1-508-261-7887 fax: 1-508 261-9699 email: usinfo@tsel.com	European Operations phone: +44 (0) 1291 620 660 email: euinfo@tsel.com

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