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Specification Sheet for Equipment:
DEPOSITION
Inventory Number:
50,30000452
Manufacturer:
APPLIED MATERIALS
Model:
Centura 5200 Oxide PECVD
Process:
FAB
Wafer Size:
200
Vintage Date:
1996
Inventory Date:
4/3/2008
Equipment Descripton:
Applied Materials Centura 5200 Oxide PECVD
*
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Last Updated:
Monday, September 06, 2010 at 12:37:31 AM