equipmentDetail

Specification Sheet for Equipment:

ETCH

Inventory Number:

50.20000826

Manufacturer:

LAM

Model:

4428

Process:

FAB

Wafer Size:

200

Vintage Date:

1996

Inventory Date:

4/3/2008

Equipment Descripton:

Lam Research 4428 Rainbow Poly Etch


US Operations phone: 1-508-261-7887 fax: 1-508 261-9699 email: usinfo@tsel.com	European Operations phone: +44 (0) 1291 620 660 email: euinfo@tsel.com

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